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Scaled X-bar TiN/HfO2/TiN RRAM cells processed with optimised plasma enhanced atomic layer deposition (PEALD) for TiN electrode
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1923 since deposited on 2021-10-21
Acq. date: 2026-04-25
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Statistics
Views
1923 since deposited on 2021-10-21
Acq. date: 2026-04-25
Citations