Low frequency noise performance of gate-first and replacement metal gate CMOS technologies

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Authors
Claeys, Cor; Lee, Jae Woo; Simoen, Eddy; Veloso, Anabela; Horiguchi, Naoto; Paraschiv, Vasile
Conference
IEEE International Conference on Electron Devices and Solid-State Circuits - EDSSC
Title
Low frequency noise performance of gate-first and replacement metal gate CMOS technologies
Publication type
Proceedings paper
Embargo date
9999-12-31
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