Epitaxial chemical vapor deposition of silicon on an oxygen monolayer on Si(100) substrates

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Authors

Delabie, Annelies; Jayachandran, Suseendran; Caymax, Matty; Loo, Roger; Maggen, Jens; Pourtois, Geoffrey; Douhard, Bastien; Conard, Thierry; Meersschaut, Johan; Lenka, Hara; Vandervorst, Wilfried; Heyns, Marc

ISSN

2162-8726

Issue

11

Journal

ECS Solid State Letters

Volume

2

Title

Epitaxial chemical vapor deposition of silicon on an oxygen monolayer on Si(100) substrates

Publication type

Journal article

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