Readying directed self-assembly for patterning in semi-conductor manufacturing

View/open

28623.pdf (14.72Mb)

Metadata

Show full item record

Authors

Gronheid, Roel; Rincon Delgadillo, Paulina; Singh, Arjun; Younkin, Todd; Sayan, Safak; Chan, BT; Van Look, Lieve; Bekaert, Joost; Pollentier, Ivan; Nealey, Paul

ISSN

0914-9244

Issue

6

Journal

Journal of Photopolymer Science and Technology

Volume

26

Title

Readying directed self-assembly for patterning in semi-conductor manufacturing

Publication type

Journal article

Embargo date

9999-12-31

Collections

Articles