Publication:

Copper through silicon via induced keep out zone for 10nm node bulk FinFET CMOS technology

Date

2013

Proceedings Paper

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Files

27291.pdf 1.31 MB

Author(s)

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Van der Plas, Geert

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Redolfi, Augusto

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Van Huylenbroeck, Stefaan

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Ivankovic, Andrej

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De Wachter, Bart

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Debusschere, Ingrid

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De Wolf, Ingrid

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Mercha, Abdelkarim

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