Metrology and inspection challenges for manufacturing 3D stacked IC's

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Authors
Halder, Sandip; Stiers, Karen; Miller, Andy; De Wolf, Ingrid; Phommahaxay, Alain; Maenhoudt, Mireille; Beyne, Eric; Guerrieri, Stefano
Conference
24th Annual SEMI Advanced Semiconductor Manufacturing Conference - ASMC
Title
Metrology and inspection challenges for manufacturing 3D stacked IC's
Publication type
Proceedings paper
Embargo date
9999-12-31
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