Publication:

Readiness of EUV lithography for insertion into manufacturing: The IMEC NXE:3100 program

Date

2013
Proceedings Paper
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Author(s)

Hendrickx, Eric  
;
Gronheid, Roel  
;
Hermans, Jan  
;
Lorusso, Gian  
;
Foubert, Philippe  
;
Pollentier, Ivan  
;
Goethals, Mieke
;
Jonckheere, Rik  
;
Vandenberghe, Geert  
;
Ronse, Kurt  

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1872 since deposited on 2021-10-21
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1872 since deposited on 2021-10-21
Acq. date: 2026-02-25

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