Publication:
Plasma-damage mitigation of a 2.0 PECVD porous organo silicon glass by pore stuffing
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1792 since deposited on 2021-10-21
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Acq. date: 2026-09-19
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Statistics
Views
1792 since deposited on 2021-10-21
1last month
1last week
Acq. date: 2026-09-19
Citations