Authors

Hikavyy, Andriy; Chew, Soon Aik; Boccardi, Guillaume; Favia, Paola; Loo, Roger

Conference

8th International Conference on Silicon Epitaxy and Heterostructures - ICSI-8

Title

Application of selective epitaxial growth for merging fins in source/drain areas of sub 20 nm FinFET transistors

Publication type

Proceedings paper

Embargo date

9999-12-31