Authors

Hikavyy, Andriy; Loo, Roger; Dhayalan, Sathish Kumar; Wostyn, Kurt; Rosseel, Erik; Simoen, Eddy; Machkaoutsan, Vladimir; Profijt, Harald; Tolle, John

Conference

E-MRS Fall Meeting Symposium A: Alternative Semiconductor Integration in Si Microelectronics

Title

Low temperature pre-epi Treatment: critical parameters to control interface contamination

Publication type

Meeting abstract

Embargo date

9999-12-31