Authors

Hikavyy, Andriy; Vanherle, Wendy; Witters, Liesbeth; Vincent, Benjamin; Dekoster, Johan; Loo, Roger

DOI

10.1149/2.009306jss

ISSN

2162-8769

Issue

6

Journal

ECS Journal of Solid State Science and Technology

Volume

2

Title

High Ge content SiGe selective processes for source/drain in manufacturing the next generations of pMOS transistors

Publication type

Journal article