Authors

Van Meirhaeghe, R. L.; Vanalme, G. M.; Goubert, L.; Cardon, F.; Van Daele, P.

Conference

Microscopy of Semiconducting Materials 1997

Title

A ballistic electron emission microscopy (BEEM)-investigation of the effects of reactive ion etching (RIE) and of chemical pretreatment on III-V semiconductors

Publication type

Proceedings paper

Embargo date

9999-12-31