Authors

Inoue, Fumihiro; Philipsen, Harold; Radisic, Alex; Armini, Silvia; Civale, Yann; Leunissen, Peter; Kondo, Muneharu; Webb, Eric; Shingubara, Shoso

ISSN

0013-4686

Journal

Electrochimica Acta

Volume

100

Title

Electroless Cu deposition on atomic layer deposited Ru as novel seed formation process in through-Si vias

Publication type

Journal article