Study of 3D process impact on advanced CMOS devices

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Authors
La Manna, Antonio; Guo, Wei; Van Huylenbroeck, Stefaan; Sirignano, Emilio; Cherman, Vladimir; Van der Plas, Geert; De Wachter, Bart; Phommahaxay, Alain; Jourdain, Anne; Beyer, Gerald; Beyne, Eric
Conference
European Microelectronics and Packaging Conference - EMPC
Title
Study of 3D process impact on advanced CMOS devices
Publication type
Proceedings paper
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