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Tensile strained GeSn on Si by solid phase epitaxy and fabrication of high mobility FET devices
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Authors
Lieten, Ruben
;
Maeda, Tatsuro
;
Jevasuwan, Wipakorn
;
Hattori, Hiroyuki
;
Uchida, Noriyuki
;
Miura, Shu
;
Tanaka, Masatoshi
;
Seo, Jin Won
;
Locquet, Jean-Pierre
Conference
Extended Abstracts of the International Conference on Solid State Devices and Materials - SSDM
Title
Tensile strained GeSn on Si by solid phase epitaxy and fabrication of high mobility FET devices
Publication type
Proceedings paper
Embargo date
9999-12-31
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