Publication:

Stress and wafer warpage analysis of GaN thin film induced by transfer bonding process on 200mm Si substrate

Date

2013

Proceedings Paper

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Author(s)

Lofrano, Melina

;

;

Rosmeulen, Maarten

;

Soussan, Philippe

Statistics

1859 since deposited on 2021-10-21

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Acq. date: 2026-10-13