Authors

Ong, Patrick; Matovu, J.B.; Leunissen, Peter; Krishnan, Sitaraman; Babu, S.V.

ISSN

2162-8769

Issue

11

Journal

ECS Journal of Solid State Science and Technology

Volume

2

Title

Fundamental investigation of chemical mechanical polishing of GaAs in ailica dispersions: Material removal and arsenic trihydride formation pathways

Publication type

Journal article