Authors

Paraschiv, Vasile; Boullart, Werner; Altamirano Sanchez, Efrain

ISSN

0167-9317

Journal

Microelectronic Engineering

Volume

105

Title

Dry etching of Mo based layers and its interdependence with a poly-Si/MoOxNy/TiN/HfO2 gate stack

Publication type

Journal article

Embargo date

9999-12-31