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Dry etching of Mo based layers and its interdependence with a poly-Si/MoOxNy/TiN/HfO2 gate stack
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1979 since deposited on 2021-10-21
Acq. date: 2026-06-07
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Statistics
Views
1979 since deposited on 2021-10-21
Acq. date: 2026-06-07
Citations