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Quantification of Ge in Si1-xGex by using low energy Cs+ and O2+ ion beams
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Authors
Pureti, Rathaiah
;
Vandervorst, Wilfried
DOI
10.1002/sia.5049
ISSN
0142-2421
Issue
1
Journal
Surface and Interface Analysis
Volume
45
Title
Quantification of Ge in Si1-xGex by using low energy Cs+ and O2+ ion beams
Publication type
Journal article
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