Enabling interconnect scaling with spacer-defined double patterning (SDDP)

View/open

23362.pdf (1.859Mb)

Metadata

Show full item record

Authors

Siew, Yong Kong; Stucchi, Michele; Versluijs, Janko; Roussel, Philippe; Kunnen, Eddy; Pantouvaki, Marianna; Beyer, Gerald; Tokei, Zsolt

ISSN

0167-9317

Journal

Microelectronic Engineering

Volume

112

Title

Enabling interconnect scaling with spacer-defined double patterning (SDDP)

Publication type

Journal article

Embargo date

9999-12-31

Collections

Articles