Ruthenium nanowires by selective atomic layer deposition

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Authors
Swerts, Johan; Wen, Liang Gong; Delabie, Annelies; Phung, Quan; Boemmels, Juergen; Tokei, Zsolt; Van Elshocht, Sven
Conference
13th International Conference on Atomic Layer Deposition - ALD 2013
Title
Ruthenium nanowires by selective atomic layer deposition
Publication type
Meeting abstract
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