Publication:
Higher-k ALD Sr-rich SrTiO3 for DRAM MIMCAP Application
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1998 since deposited on 2021-10-21
4last month
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Acq. date: 2026-01-09
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Views
1998 since deposited on 2021-10-21
4last month
2last week
Acq. date: 2026-01-09
Citations