Authors

Van Besien, Els; Wang, Cong; Verdonck, Patrick; Singh, Arjun; Barbarin, Yohan; Schaekers, Marc; Baklanov, Mikhaïl; Van Elshocht, Sven

Conference

IEEE International Interconnect Technology Conference - IITC

Title

Development and evaluation of a-SiC:H films using a dimethylsilacyclopentane precursor as a low -k Cu capping layer in advanced interconnects

Publication type

Proceedings paper