Progress in directed self-assembly hole shrink applications

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Authors
Younkin, Todd; Gronheid, Roel; Rincon Delgadillo, Paulina; Chan, BT; Vandenbroeck, Nadia; Demuynck, Steven; Romo Negreira, Ainhoa; Parnell, Doni; Nafus, Kathleen; Tahara, Shigeru; Somervell, Mark
Conference
Advances in Resist Materials and Processing Technology XXX
Title
Progress in directed self-assembly hole shrink applications
Publication type
Proceedings paper
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