Publication:
The influence of the initial LWR, CD and EUV-resist composition on LWR reduction by H2 plasma treatment
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1847 since deposited on 2021-10-22
2last month
Acq. date: 2025-12-11
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Metrics
Views
1847 since deposited on 2021-10-22
2last month
Acq. date: 2025-12-11
Citations