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Material studies on Si:C and Si:CP epitaxial films grown using disilane, monomethylsilane and phosphine
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1845 since deposited on 2021-10-22
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Acq. date: 2025-10-24
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Views
1845 since deposited on 2021-10-22
412item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations