Authors

Dhayalan, Sathish Kumar; Loo, Roger; Rosseel, Erik; Hikavyy, Andriy; Shimura, Yosuke; Nuytten, Thomas; Richard, Olivier; Bender, Hugo; Douhard, Bastien; Vandervorst, Wilfried

Conference

226th Fall Meeting of the Electrochemical Society

Title

Material studies on Si:C and Si:CP epitaxial films grown using disilane, monomethylsilane and phosphine

Publication type

Meeting abstract