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Material studies on Si:C epitaxial films grown by CVD
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Authors
Dhayalan, Sathish Kumar
;
Loo, Roger
;
Rosseel, Erik
;
Hikavyy, Andriy
;
Shimura, Yosuke
;
Nuytten, Thomas
;
Richard, Olivier
;
Bender, Hugo
;
Douhard, Bastien
;
Vandervorst, Wilfried
Conference
SiGe, Ge, and Related Compounds 6: Materials, Processing, and Devices
Title
Material studies on Si:C epitaxial films grown by CVD
Publication type
Proceedings paper
Embargo date
9999-12-31
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