Publication:

Material studies on Si:C epitaxial films grown by CVD

Date

2014-10

Proceedings Paper

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Files

30625.pdf 811.43 KB

Author(s)

Dhayalan, Sathish Kumar

;

;

;

Hikavyy, Andriy

;

Shimura, Yosuke

;

Nuytten, Thomas

;

Richard, Olivier

;

;

Douhard, Bastien

;

Vandervorst, Wilfried

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Acq. date: 2026-02-25