Authors

Illarionov, Yu. Yu.; Bina, M.; Tyaginov, S. E.; Rott, K.; Reisinger, H.; Kaczer, Ben; Grasser, T.

Conference

International Reliability Physics Symposium - IRPS

Title

A reliable method for the extraction of the lateral position of defects in ultra-scaled MOSFETs

Publication type

Proceedings paper