Authors

Jiang, Sijia; Merckling, Clement; Guo, Weiming; Waldron, Niamh; Caymax, Matty; Vandervorst, Wilfried; Seefeldt, Marc; Heyns, Marc

ISSN

0022-0248

Journal

Journal of Crystal Growth

Volume

391

Title

Growth rate for the SEG of III-V compounds inside submicron STI trenches on Si (001) substrates by MOVPE: modeling and experiments

Publication type

Journal article