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Dislocation density and tetragonal distortion of a GaN epilayer on Si(111): a comparative RBS/C and TEM study
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Authors
Lenka, Hara
;
Meersschaut, Johan
;
Kandaswamy, Prem Kumar
;
Modarresi, H.
;
Bender, Hugo
;
Vantomme, Andre
;
Vandervorst, Wilfried
ISSN
0168-583X
Journal
Nuclear Instruments and Methods in Physics Research B
Volume
331
Title
Dislocation density and tetragonal distortion of a GaN epilayer on Si(111): a comparative RBS/C and TEM study
Publication type
Journal article
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