Publication:

Laser thermal anneal of polysilicon channel to boost 3D memory performance

Date

2014
Proceedings Paper
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Author(s)

Lisoni, Judit
;
Arreghini, Antonio  
;
Congedo, Gabriele
;
Toledano Luque, Maria
;
Toqué-Trésonne, Inès
;
Huet, Karim
;
Capogreco, Elena  
;
Liu, Lifang
;
Tan, Chi Lim
;
Degraeve, Robin  
;
Van den Bosch, Geert  
;
Van Houdt, Jan  

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