Laser thermal anneal of polysilicon channel to boost 3D memory performance

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Authors
Lisoni, Judit; Arreghini, Antonio; Congedo, Gabriele; Toledano Luque, Maria; Toqué-Trésonne, Inès; Huet, Karim; Capogreco, Elena; Liu, Lifang; Tan, Chi Lim; Degraeve, Robin; Van den Bosch, Geert; Van Houdt, Jan
Conference
Symposium on VLSI Technology
Title
Laser thermal anneal of polysilicon channel to boost 3D memory performance
Publication type
Proceedings paper
Embargo date
9999-12-31
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