Low-temperature formation of source-drain contacts in self-aligned amorphous oxide TFTs

Simple item page Full metadata Statistics

Author(s)

;

;

Steudel, Soeren

;

;

Bhoolokam, Ajay

;

Vaisman Chasin, Adrian

;

;

;

;

;

Kumar, Abhishek

;

Gelinck, Gerwin

;

;

Groeseneken, Guido

;

Metrics

1954 since deposited on 2021-10-22

Acq. date: 2025-10-26