Amorphous-IGZO thin-film-transistors with mf-PVD SiO2 as an etch-stop-layer

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Authors
Nag, Manoj; Steudel, Soeren; Bhoolokam, Ajay; Vaisman Chasin, Adrian; Myny, Kris; Mass, Joris; Fritz, Thomas; Trube, Jutta; Gelinck, Gerwin; Groeseneken, Guido; Heremans, Paul
Conference
10th International Thin-Film Transistor Conference - ITC
Title
Amorphous-IGZO thin-film-transistors with mf-PVD SiO2 as an etch-stop-layer
Publication type
Oral presentation
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