Characterization of PECVD silicon nitride photonic components at 532 and 900 nm wavelength

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Authors
Neutens, Pieter; Subramanian, Ananth; Mahmud Ul Hasan, Hasan MD; Chen, Chang; Jansen, Roelof; Claes, Tom; Rottenberg, Xavier; Du Bois, Bert; Leyssens, Kenny; Helin, Philippe; Severi, Simone; Dhakal, Ashim; Peyskens, Frederic; Lagae, Liesbet; Deshpande, Paru; Baets, Roel; Van Dorpe, Pol
Conference
Silicon Photonics and Photonic Integrated Circuits IV
Title
Characterization of PECVD silicon nitride photonic components at 532 and 900 nm wavelength
Publication type
Proceedings paper
Embargo date
9999-12-31
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