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TEM analysis and electrical probing on thin TEM lamellas of CBRAM stacks
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Authors
Seidel, Felix
;
Richard, Olivier
;
Bender, Hugo
;
Hantschel, Thomas
;
Goux, Ludovic
;
Jurczak, Gosia
;
Vandervorst, Wilfried
Conference
18th International Microscopy Conference - IMC
Title
TEM analysis and electrical probing on thin TEM lamellas of CBRAM stacks
Publication type
Oral presentation
Embargo date
9999-12-31
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