Publication:

Cu wire resistance improvement using Mn-based self-formed barriers

Date

2014

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

Siew, Yong Kong

;

Jourdan, Nicolas

;

;

;

;

;

Demuynck, Steven

;

;

Cellier, Daniel

;

Cockburn, Andrew

;

Boemmels, Juergen

;

Statistics

1986 since deposited on 2021-10-22

Acq. date: 2026-04-05