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Using chemo-epitaxial directed self-assembly for repair and frequency multiplication of EUVL contact-hole patterns
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Authors
Singh, Arjun
;
Parnell, Doni
;
Chan, BT
;
Gronheid, Roel
Conference
Alternative Lithographic Technologies VI
Title
Using chemo-epitaxial directed self-assembly for repair and frequency multiplication of EUVL contact-hole patterns
Publication type
Proceedings paper
Embargo date
9999-12-31
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