Engineering the IIIV gate stack properties by optimization of the ALD process

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Authors
Sioncke, Sonja; Ivanov, Tsvetan; Lin, Dennis; Franco, Jacopo; Vais, Abhitosh; Ameen, Mahmoud; Delabie, Annelies; Xie, Qi; Maes, Jan; Givens, Michael; Tang, Fu; Van Elshocht, Sven; Holsteyns, Frank; Barla, Kathy; Collaert, Nadine; Thean, Aaron; De Gendt, Stefan; Heyns, Marc
Conference
226th ECS Fall Meeting
Title
Engineering the IIIV gate stack properties by optimization of the ALD process
Publication type
Meeting abstract
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