Publication:
TiN/TaN selective etch in replacement metal gate with chlorine based plasmas
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Downloads
3 since deposited on 2021-10-22
Acq. date: 2026-01-09
Views
1984 since deposited on 2021-10-22
1last month
Acq. date: 2026-01-09
Citations
Metrics
Downloads
3 since deposited on 2021-10-22
Acq. date: 2026-01-09
Views
1984 since deposited on 2021-10-22
1last month
Acq. date: 2026-01-09
Citations