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TiN/TaN selective etch in replacement metal gate with chlorine based plasmas
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Authors
Tao, Zheng
;
Paraschiv, Vasile
;
Dekkers, Harold
;
Dangol, Anish
;
soon aik, chew
Conference
Plasma Etch and Strip in Microtechnology - PESM
Title
TiN/TaN selective etch in replacement metal gate with chlorine based plasmas
Publication type
Meeting abstract
Embargo date
9999-12-31
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