Publication:
TiN/TaN selective etch in replacement metal gate with chlorine based plasmas
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3 since deposited on 2021-10-22
Acq. date: 2026-02-25
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1984 since deposited on 2021-10-22
Acq. date: 2026-02-25
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Downloads
3 since deposited on 2021-10-22
Acq. date: 2026-02-25
Views
1984 since deposited on 2021-10-22
Acq. date: 2026-02-25
Citations