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The impact of plasma-induced surface damage on photoelectrochemical properties of GaN pillars fabricated by dry etching
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Authors
Tseng, Peter
;
van Dorp, Dennis
;
Lieten, Ruben
;
Vereecken, Philippe
;
Langer, Robert
;
Borghs, Gustaaf
ISSN
1932-7447
Journal
Journal of Physical Chemistry C
Volume
118
Title
The impact of plasma-induced surface damage on photoelectrochemical properties of GaN pillars fabricated by dry etching
Publication type
Journal article
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