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High-Q photonic crystal nanocavities on 300 mm SOI substrate fabricated by 193 nm immersion lithography
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Authors
Xie, Weiqiang
;
Fiers, Martin
;
Selvaraja, Shankar
;
Bienstman, Peter
;
Van Campenhout, Joris
;
Absil, Philippe
;
Van Thourhout, Dries
ISSN
0733-8724
Issue
8
Journal
Journal of Lightwave Technology
Volume
32
Title
High-Q photonic crystal nanocavities on 300 mm SOI substrate fabricated by 193 nm immersion lithography
Publication type
Journal article
Embargo date
9999-12-31
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