Lateral versus vertical gate-all-around FETs for beyond 7nm technologies

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Authors
Yakimets, Dmitry; Huynh Bao, Trong; Garcia Bardon, Marie; Dehan, Morin; Collaert, Nadine; Mercha, Abdelkarim; Tokei, Zsolt; Thean, Aaron; Verkest, Diederik; De Meyer, Kristin
Conference
72nd Device Research Conference - DRC
Title
Lateral versus vertical gate-all-around FETs for beyond 7nm technologies
Publication type
Proceedings paper
Embargo date
9999-12-31
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