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Stacked-etch induced charge loss in hybrid floating gate cells using high- $j inter-gate dielectric
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Authors
Zahid, Mohammed
;
Breuil, Laurent
;
Degraeve, Robin
;
Blomme, Pieter
;
Tan, Chi Lim
;
Lisoni, Judit
;
Van den Bosch, Geert
;
Van Houdt, Jan
Conference
International Reliability Physics Symposium - IRPS
Title
Stacked-etch induced charge loss in hybrid floating gate cells using high- $j inter-gate dielectric
Publication type
Proceedings paper
Embargo date
9999-12-31
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