Authors

Cavaco, Celso; Peng, Lan; De Leersnijder, Koen; Guerrieri, Stefano; Sabuncuoglu Tezcan, Deniz; Osman, Haris

Conference

IMAPS 48th Annual international symposium on Microelectronics

Title

Copper oxide direct bonding of 200mm CMOS wafers: morphological and electrical characterization

Publication type

Proceedings paper