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On the effects of a pressure iInduced amorphous silicon layer on consecutive spreading resistance microscopy scans of doped silicon
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Authors
Coq Germanicus, Rosine
;
Leclère, Philippe
;
Guhel, Y.
;
Boudart, B.
;
Touboul, A. D.
;
Descamps, P.
;
Hug, E.
;
Eyben, Pierre
ISSN
0021-8979
Issue
24
Journal
Journal of Applied Physics
Volume
117
Title
On the effects of a pressure iInduced amorphous silicon layer on consecutive spreading resistance microscopy scans of doped silicon
Publication type
Journal article
Embargo date
9999-12-31
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