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Chemical vapour deposition of Si:C and Si:C:P films – evaluation of material quality as a function of C content, carrier gas and doping
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Authors
Dhayalan, Sathish Kumar
;
Loo, Roger
;
Hikavyy, Andriy
;
Rosseel, Erik
;
Bender, Hugo
;
Richard, Olivier
;
Vandervorst, Wilfried
ISSN
0022-0248
Journal
Journal of Crystal Growth
Volume
426
Title
Chemical vapour deposition of Si:C and Si:C:P films – evaluation of material quality as a function of C content, carrier gas and doping
Publication type
Journal article
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