Authors

Franquet, Alexis; Douhard, Bastien; Merckling, Clement; Conard, Thierry; Vandervorst, Wilfried

Conference

20th International Conference on Secondary Ion Mass Spectrometry - SIMS XX

Title

Composition analysis of III-V materials grown in nanostructures for semiconductor applications: the self focusing SIMS approach

Publication type

Meeting abstract

Embargo date

9999-12-31