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Development of a Cu and W compatible PERR clean in BEOL advanced interconnect patterning
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Authors
Kesters, Els
;
Le, Quoc Toan
;
Decoster, Stefan
;
Vega Gonzalez, Victor
;
Holsteyns, Frank
;
De Gendt, Stefan
Conference
Semiconductor Cleaning Science and Technology 14 - SCST 14
Title
Development of a Cu and W compatible PERR clean in BEOL advanced interconnect patterning
Publication type
Proceedings paper
Embargo date
9999-12-31
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