Authors

Lee, Ko-Hui; Degraeve, Robin; Toledano Luque, Maria; Arreghini, Antonio; Breuil, Laurent; Blomme, Pieter; Van den Bosch, Geert; Van Houdt, Jan

ISSN

0167-9317

Journal

Microelectronic Engineering

Volume

147

Title

Assessment of tunnel oxide and poly-Si channel traps in 3D SONOS memory before and after P/E cycling

Publication type

Journal article