Directed self-assembly graphoepitaxy template generation with immersion lithography

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Authors

Ma, Yuansheng; Lei, Junjiang; Torres, J. Andres; Hong, Le; Word, James; Fenger, Germain; Tritchkov, Alexander; Lippincott, George; Gupta, Rachit; Lafferty, Neal; He, Yuan; Bekaert, Joost; Vandenberghe, Geert

DOI

10.1117/1.JMM.14.3.031216

ISSN

1932-5150

Issue

3

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

Volume

14

Title

Directed self-assembly graphoepitaxy template generation with immersion lithography

Publication type

Journal article

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