Directed self-assembly graphoepitaxy template generation with immersion lithography

Ma, Yuansheng; Lei, Junjiang; Torres, J. Andres; Hong, Le; Word, James; Fenger, Germain; Tritchkov, Alexander; Lippincott, George; Gupta, Rachit; Lafferty, Neal; He, Yuan; Bekaert, Joost; Vandenberghe, Geert

doi:10.1117/1.jmm.14.3.031216

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Directed self-assembly graphoepitaxy template generation with immersion lithography

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2015

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https://doi.org/10.1117/1.jmm.14.3.031216

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Journal of Micro/Nanolithography MEMS and MOEMS

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Directed self-assembly graphoepitaxy template generation with immersion lithography

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